Ellipsometry

Horiba  Ellipsometer

Transparent thin films thickness and uniformity determination

Non-contact measurements using a multiwavelength source

Up to 6" in size.

Features

Samples from 5mm x 5mm to 6" in diameter

Wide range of material available in reference library

Dektak  Surface Profiler 10th generation

Fast for measurement 

Automated XY Theta sample stage 

Features

Samples size up to 6" wafer, up to 35 mm thick

Measures vertical steps between several nm and 1 mm deep

5 Angstrom reproducibility

Veeco FFP5000 model of probe

Equipped with a Jandel MWP external probe and sample holder

The stage is capable of accepting wafers up to 100mm diameter and has indexed locations to permit reproducible positioning

Features

Automatic measurement of Ohms/square or V/I values

Thickness and resistivity of materials can be calculated after entering resistivity and thickness

Probe Needle radius is 120 µm, Probe tip spacing is 1.591mm, Probe tip force is 40g per needle. Needles placed in row configuration

Minimum sample size is 25mm