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Sputter coater
SVS 6000
Four 2” sources
Ion Gun System for sample cleaning
Max sample size 3”
Metals include Nb, Au
Sputter coater
K J Lesker PVD 75
Three Magnetron sputter sources 3 inches in diameter.
One of which can be selected in sequence.
RF or DC power to sputter insulating or conductive materials. The substrate cleaning via RF Bias.
E-BEAM evaporator
A500
4 pocket Temescal Electron Beam gun
2 thermal sources
Max sample size 6”
Metals include Ti, Au, Mo, Pt
THERMAL EVAPORATOR
A306 Metal box
Four independent source positions allowing multiple layers to be deposited without breaking vacuum.
The maximum sample size is 200mm in diameter, or multiple smaller pieces.
THERMAL EVAPORATOR
A306 Bell Jar
Four independent source positions allowing multiple layers to be deposited without breaking vacuum. The maximum sample size is 200mm diameter, or multiple smaller pieces.