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PECVD TOOL
STS PECVD
6" wafer carrier loadlock system
380kHz and 13.56MHz RF generators
Stress controlled films for deposition available:
Silicon dioxide
silicon nitride
silicon oxynitride
ALD TOOL
Ultratech Savannah S200 ALD
Conformal coating of films on substrates up to 8" in diameter
Films available:
Aluminium oxide
Hafnium dioxide
Silicon dioxide
Zirconium dioxide